JPH0420993B2 - - Google Patents

Info

Publication number
JPH0420993B2
JPH0420993B2 JP17637983A JP17637983A JPH0420993B2 JP H0420993 B2 JPH0420993 B2 JP H0420993B2 JP 17637983 A JP17637983 A JP 17637983A JP 17637983 A JP17637983 A JP 17637983A JP H0420993 B2 JPH0420993 B2 JP H0420993B2
Authority
JP
Japan
Prior art keywords
etching
shadow mask
metal plate
water
washed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17637983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6070186A (ja
Inventor
Yasuhisa Ootake
Makoto Harikae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP17637983A priority Critical patent/JPS6070186A/ja
Publication of JPS6070186A publication Critical patent/JPS6070186A/ja
Publication of JPH0420993B2 publication Critical patent/JPH0420993B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP17637983A 1983-09-26 1983-09-26 シヤドウマスクの製造方法 Granted JPS6070186A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17637983A JPS6070186A (ja) 1983-09-26 1983-09-26 シヤドウマスクの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17637983A JPS6070186A (ja) 1983-09-26 1983-09-26 シヤドウマスクの製造方法

Publications (2)

Publication Number Publication Date
JPS6070186A JPS6070186A (ja) 1985-04-20
JPH0420993B2 true JPH0420993B2 (en]) 1992-04-07

Family

ID=16012604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17637983A Granted JPS6070186A (ja) 1983-09-26 1983-09-26 シヤドウマスクの製造方法

Country Status (1)

Country Link
JP (1) JPS6070186A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2746876B2 (ja) * 1986-09-30 1998-05-06 株式会社東芝 シヤドウマスクの製造方法
JPS63190181A (ja) * 1987-01-30 1988-08-05 Dainippon Printing Co Ltd シヤドウマスクの製造方法
JPH084370Y2 (ja) * 1991-12-09 1996-02-07 有限会社アイビ−工業 洗浄装置
JP4030604B2 (ja) * 1995-11-30 2008-01-09 凸版印刷株式会社 シャドウマスクの製造方法
US5883012A (en) * 1995-12-21 1999-03-16 Motorola, Inc. Method of etching a trench into a semiconductor substrate

Also Published As

Publication number Publication date
JPS6070186A (ja) 1985-04-20

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